NE 180 Engineering at the Nanoscale 2R-0L-2C S
Prerequisites: There are no prerequisites for this course.
Corequisites: There are no corequisites for this course.
Introduction to nanoscience and engineering: properties and behavior of materials, devices, and systems (natural and artificial) at nanoscale, applications of nanoscience. Characterization techniques: Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and thin film measurements. Basic cleanroom safety and experience, microfabrication processing techniques: photolithography, thin film deposition. Intro to design and data analysis software.
NE 280 Introduction to NanoEngineering 3.5R-1.5L-4C W
Prerequisites: There are no prerequisites for this course.
Corequisites: There are no corequisites for this course.
Scaling laws in small systems; electronics and photonics devices and systems, basics of quantum and statistical mechanics, nanomaterials and fabrication: examples of zero, one, two, and three dimensional nanostructures, carbon nanotubes, Nanoelectronics: basics of solid state physics; electron energy band, semiconductors, tunneling and quantum structures, molecular electronics, Nanophotonics in metals and semiconductors, surface plasmon resonance and applications, photonic bandgap crystals.
NE 320 Fundamentals of Thin Films: Fabrication and Applications 3R-3L-4C F
Prerequisites: NE 280 Introduction to NanoEngineering
Corequisites: There are no corequisites for this course.
Two- and three-dimensional nanostructures, including thin film materials, single and multi-layer nano-films, electronic energy band structures, thin-film and high-k electronics, multiple quantum well devices, and optical bandgap engineering. Thin film characterization, thermal properties of thin films, growth kinetics, coating and thin film fabrication techniques: sputtering, thermal evaporation, PECVD, and atomic layer deposition.
NE 380 Nanotechnology, Entrepreneurship & Ethics 3.5R-1.5L-4C S
Prerequisites: NE 280 Introduction to NanoEngineering
Corequisites: There are no corequisites for this course.
Scaling laws in small systems; mechanical, biological, fluidics, and thermal systems. Nanomaterials and nanofabrication. Nanomechanics: cantilever oscillation, atomic-force microscopy (AFM) and its applications, nano-biotechnology, machinery of cell, and molecular motors. Nanoscale optics, Nanoscale heat: conduction, convection, and blackbody radiation. Basics of fluidics, nanoscale fluidics and applications, entrepreneurship and ethics, concepts and tools in innovation and social impacts of nanotechnology.
NE 406 Semiconductor Devices & Fabrication 3R-3L-4C W
Prerequisites: PH 405 Semiconductor Materials & Applications or ECE 250 Electronic Device Modeling
Corequisites: There are no corequisites for this course.
Physical properties and applications of semiconductor devices including bipolar junction transistors (BJT), metal-semiconductor contacts (Schottky and ohmic), junction field effect transistors (JFET and MESFET), metal-oxidesemiconductor (MOS) interfaces and field effect transistors (MOSFET and CMOS), photoconductors, photodetectors (PIN and APD), solar cells, light emitting diodes (LED), and laser diodes. Laboratory experiments will cover the following topics: characterization of semiconductor devices, op-amps, CMOS, NAND and other logic and analog components. Cross-listed with NE 506.
NE 407 Nanoelectronic And Semiconductor Devices 2R-6L-4C F
Prerequisites: NE 406 Semiconductor Devices & Fabrication or NE 506 Semiconductor Devices & Fabrication
Corequisites: There are no corequisites for this course.
Fabrication and characterization of micro/nanoelectronic devices; Process integration of various technologies, including CMOS, 2D materials, and nanowires; Surface processing for improved performance, including passivation, anti-reflection structures, and protective coatings. Process and device simulators illustrate concepts introduced in class. Laboratory is an integral component of this class in which students will fabricate a multi-junction semiconductor device. In-process measurement results are compared with final electrical test results and simulated designs.
NE 408 Microsensors and Actuators 3R-3L-4C S
Prerequisites: NE 410 Introduction to MEMS: Fabrications & Applications or Junior or Senior standing and consent of instructor
Corequisites: There are no corequisites for this course.
Microelectromechanical (MEMS) systems composed of microsensors, microactuators, and electronics integrated onto a common substrate. Design, fabrication, and operation principles. Examples of microsensors covered in the course include: thermal, radiation, mechanical, chemical, and biological. Laboratory is a team design project in which the students fabricate sensing devices such as pressure or thermal sensors and then characterize their behavior. Cross-listed with NE 508.
NE 410 Introduction to MEMS: Fabrication & Applications 3R-3L-4C S
Prerequisites: Junior or Senior class standing
Corequisites: There are no corequisites for this course.
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Cross-listed with ME 416, ECE 416, and CHE 405.
NE 411 Advanced Topics in MEMS 3R-3L-4C F
Prerequisites: NE 410 Introduction to MEMS: Fabrication & Applications or equivalent course
Corequisites: There are no corequisites for this course.
Topics such as: Microlithography, design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Cross-listed with ECE 419, and CHE 419.
